R14 (tetrafluoromethane) is a deep-cryogenic PFC fluid with a boiling point as low as -128℃. It is used in sub -120℃ cascade refrigeration and semiconductor etching processes.
| Chemical Name | 四氟化碳 |
|---|---|
| Molecular Formula | CF₄ |
| Molecular Weight | 88.00 |
| Boiling Point (101.3 kPa) | -128.0 ℃ |
| Critical Temperature | -45.6 ℃ |
| Critical Pressure | 3.74 MPa |
| ODP (Ozone Depletion Potential) | 0 |
| GWP (Global Warming Potential) | 6630 |
| ASHRAE Safety Class | A1（无毒、不可燃） |
| Appearance | 无色透明、无浑浊 |
|---|---|
| Purity | ≥ 99.9 % |
| Moisture | ≤ 10 ppm |
| Acidity (as HCl) | ≤ 1 ppm |
| Evaporation Residue | ≤ 0.01 % |
| Executing Standard | 符合国家标准及行业标准 |
※ Packaging specs and labels can be customized; bulk orders can be delivered by tank truck.
R14 is a PFC with high GWP and very long atmospheric lifetime. Use and emission must strictly follow environmental regulations; recover with dedicated equipment and never vent.
| Storage & Transport | Store in a cool, well-ventilated warehouse away from fire and heat; temperature not above 52℃. Keep separated from oxidizers and acids. Inspect cylinders periodically and handle gently. |
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