Tetrafluoromethane
| Chemical name | Tetrafluoromethane (Carbon Tetrafluoride) |
|---|---|
| Common names / synonyms | R14, CFC-14, PFC-14, Freon 14, Carbon Tetrafluoride, Perfluoromethane (CF₄) |
| CAS number | 75-73-0 |
| UN number | 1982 (compressed gas) |
| Dangerous goods code | Class 2.2 Non-flammable, non-toxic gas |
| Molecular formula | CF4 |
| Molecular weight | 88.00 g/mol |
| Recommended use | Ultra-low temperature refrigerant, semiconductor etching gas, electrical insulating gas, laser gas, etc. |
| Supplier name | Anhui Kelvins Refrigeration Technology Co., Ltd. |
|---|---|
| Address | Room 302, Building B, No. 396 Songgu Road, Hefei, China |
| Postal code | 230601 |
| Telephone | +86 551 6558 9290 |
| Fax | +86 551 6558 9290 |
| sales@klven.cn |
National Chemical Emergency Hotline (China): +86-532-83889090 (24 hours)
Zhejiang Province Chemical Emergency Hotline: +86-571-88071797
Supplier Emergency Contact: +86 551 6558 9290
Note: This substance belongs to ASHRAE Safety Group A1 (low toxicity, non-flammable). It is essentially non-toxic (LC₅₀ >500,000 ppm). The primary hazards are physical high-pressure gas danger and asphyxiation. The vapor pressure is extremely high (3800 kPa at 25°C), with a very low critical temperature (-45.6°C), meaning it cannot be liquefied at ambient temperature. GWP is as high as 7390, making it an extremely potent greenhouse gas.
Signal word: Warning
This product is a pure substance.
| Component name | CAS No. | Concentration (by mass) |
|---|---|---|
| Tetrafluoromethane | 75-73-0 | ≥99.9% (semiconductor grade ≥99.999%) |
| Impurity | Industrial Grade | Electronic Grade (Semiconductor) |
|---|---|---|
| Acidity (as HF) | ≤0.1 ppm | ≤0.01 ppm |
| Moisture | ≤10 ppm | ≤1 ppm |
| Air (N₂+O₂) | ≤100 ppm | ≤5 ppm |
| CO₂ | ≤50 ppm | ≤1 ppm |
| Other fluorocarbons | ≤500 ppm | ≤5 ppm |
General advice: Remove victim from contaminated area immediately. Keep warm and at rest. Show this SDS to attending physician.
Inhalation:
Skin contact (frostbite / high-pressure gas injection injury):
Eye contact:
Ingestion:
Not applicable. This substance is a compressed gas; ingestion exposure is not expected.
Suitable extinguishing media: This substance is non-flammable. Use extinguishing agent appropriate for surrounding fire. Carbon dioxide, dry chemical, water fog, and foam are acceptable.
Unsuitable extinguishing media: No specific contraindications.
Hydrogen fluoride (HF) and other fluorinated compounds (only at extremely high temperatures).
See Section 8 (Exposure controls/personal protection) and Section 13 (Disposal considerations).
For industrial use only. Personnel must be professionally trained. Primarily used for ultra-low temperature refrigeration, semiconductor etching processes, and electrical insulation. Do not use for direct food contact, medical inhalation, or other unapproved applications. Note: This substance is an extremely potent greenhouse gas (GWP = 7390); emissions and leaks must be strictly controlled.
| China OEL (Occupational Exposure Limit) | No established legal limit. This substance is a simple asphyxiant; workplace oxygen level should be maintained at ≥19.5% |
|---|---|
| ACGIH TLV-TWA (USA) | No specific limit established (simple asphyxiant). Refer to oxygen level guidelines |
| OSHA PEL-TWA (USA) | Not established (simple asphyxiant) |
| Biological limit value | Not established |
Note: This substance is a simple asphyxiant and is essentially non-toxic. The primary hazard is oxygen displacement at high concentrations leading to asphyxiation. Control measures should focus on monitoring workplace oxygen levels (≥19.5%).
Gas chromatography with thermal conductivity detection (GC-TCD) or mass spectrometry (GC-MS), non-dispersive infrared spectroscopy (NDIR), oxygen level monitors.
Respiratory protection:
Eye/face protection:
Skin protection:
| Appearance and odor | Colorless, odorless gas; gaseous at ambient temperature and pressure. Extremely chemically inert. |
|---|---|
| Odor threshold | No odor |
| pH | Not applicable (gas) |
| Melting point / Freezing point | -183.6 °C (-298.5 °F) |
| Boiling point / Boiling range (101.3 kPa) | -128 °C (-198.4 °F) |
| Flash point | None (non-flammable gas) |
| Evaporation rate | Not available |
| Flammability (gas) | Non-flammable |
| Explosive limits (upper/lower) | Not applicable (non-flammable gas) |
| Vapor pressure (25°C) | 3800 kPa (extremely high, approximately 37.5 atm) |
| Vapor density (25°C, 1 atm) | 3.62 g/L (approximately 3.0, heavier than air) |
| Gas relative density (air = 1) | Approximately 3.0 |
| Solubility | Very slightly soluble in water (~0.0015 g/L at 25°C); slightly soluble in ethanol and ether |
| Octanol/water partition coefficient (log P) | ~1.2 |
| Auto-ignition temperature | Not applicable (non-flammable) |
| Decomposition temperature | >1000°C onset of slow decomposition |
| Viscosity (gas, 25°C) | ~17.3 μPa·s |
| Thermal conductivity (gas, 25°C) | ~0.0159 W/(m·K) |
| Critical temperature | -45.6 °C (-50.1 °F) (extremely low; cannot be liquefied at ambient temperature) |
|---|---|
| Critical pressure | 3740 kPa (3.74 MPa / 543 psia) |
| Critical density | 0.63 g/cm³ |
| Heat of vaporization (at boiling point) | 136 kJ/kg |
| Gas specific heat (25°C, constant pressure) | 0.707 kJ/(kg·°C) |
| Henry's Law constant (25°C) | Not available |
| ASHRAE safety group | A1 (low toxicity, non-flammable) |
|---|---|
| Ozone Depletion Potential (ODP) | 0 (does not deplete ozone layer; see Section 12.6) |
| Global Warming Potential (GWP, 100-yr) | 7390 (extremely potent greenhouse gas; see Section 12.6) |
Extremely chemically inert; does not readily undergo any chemical reactions under normal temperature and pressure. One of the most stable organic compounds known.
Extremely stable under normal conditions of temperature and pressure. Exhibits high thermal stability even at elevated temperatures.
High temperature, open flame, electric arc, direct heat sources, cylinder overpressure
Reactive metals (lithium, sodium, potassium, etc., especially at high temperatures or in molten state), strong reducing agents
Hydrogen fluoride (HF) and other fluorinated compounds (only at extremely high temperatures)
Will not occur.
| Rat inhalation LC50 (4 hr) | >500,000 ppm (essentially non-toxic, highest concentration tested) |
|---|---|
| Rabbit dermal LD50 | Not available (gaseous substance) |
No skin irritation/corrosion in gaseous state. High-pressure gas injection can cause physical frostbite and mechanical injury.
No eye irritation/corrosion in gaseous state. High-pressure gas injection can cause physical frostbite and mechanical injury.
No sensitization reported.
No data available. Based on its chemical inertness, no mutagenic effect is expected.
No evidence of carcinogenicity.
No data available. Based on its chemical inertness, no reproductive toxicity is expected.
No specific target organ toxicity. This substance is a simple asphyxiant; the only effect of high-concentration exposure is central nervous system symptoms caused by hypoxia (dizziness, headache, loss of consciousness).
No target organ toxicity observed after repeated exposure. Based on its chemical inertness, no repeated exposure toxicity is expected.
This substance is a simple asphyxiant; the primary hazard is oxygen displacement at high concentrations leading to asphyxiation. It does not cause chemical lung injury or aspiration pneumonia. Asphyxiation symptoms worsen as oxygen levels decrease: 16–19% causes rapid breathing and decreased attention; 10–14% causes impaired judgment and dizziness; 6–10% causes nausea, vomiting, and loss of consciousness; <6% can be fatal within a short time.
| Fish acute toxicity (LC50, 96 hr) | Not available (chemically inert, expected to be of low toxicity) |
|---|---|
| Daphnia acute toxicity (EC50, 48 hr) | Not available |
| Algae growth inhibition (EC50, 72 hr) | Not available |
| Bacterial toxicity | Not available |
log P = 1.2. Very low bioaccumulation potential (below the bioconcentration threshold of log P = 4.5).
Highly volatile in gaseous form; practically insoluble in water. Rapidly volatilizes to atmosphere when released to soil.
This substance is extremely persistent in the environment (atmospheric lifetime ~50,000 years), but has low bioaccumulation and low toxicity. It does not strictly meet the toxicity (T) and bioaccumulation (B) criteria of the PBT standard, but qualifies as a very persistent substance (vP).
Product/residues:
Contaminated packaging:
1982 (Tetrafluoromethane, compressed gas)
TETRAFLUOROMETHANE
Class 2.2 Non-flammable, non-toxic gas
Not applicable (Class 2 gases are not assigned a packing group)
Road transport:
Rail transport:
Marine transport (IMDG Code):
Air transport (ICAO/IATA DGR):
International regulations:
Chemical Safety Assessment has not been carried out for this substance in the context of this SDS. Users should conduct their own assessment based on specific use conditions.
| Abbreviation | Full term |
|---|---|
| SDS / MSDS | Safety Data Sheet / Material Safety Data Sheet |
| GHS | Globally Harmonized System of Classification and Labelling of Chemicals |
| CAS | Chemical Abstracts Service (registry number) |
| UN | United Nations (dangerous goods number) |
| ODP | Ozone Depletion Potential |
| GWP | Global Warming Potential |
| PFC | Perfluorocarbon |
| CFC | Chlorofluorocarbon |
| LC50 | Lethal Concentration, 50% |
| LD50 | Lethal Dose, 50% |
| TLV-TWA | Threshold Limit Value - Time-Weighted Average |
| PEL | Permissible Exposure Limit |
| SCBA | Self-Contained Breathing Apparatus |
| PBT | Persistent, Bioaccumulative, and Toxic |
This Safety Data Sheet (SDS) has been prepared in accordance with GB/T 16483-2008 and the UN GHS standard, and is intended to provide guidance on the safe use, handling, and disposal of the product. The information serves only as a safe handling guide and does not constitute a guarantee of product specifications or performance. Users should assess its applicability based on specific use conditions and local regulatory requirements, and take necessary safety precautions. The preparer assumes no legal liability for any direct or indirect losses arising from the use of the information in this document. The data in this document may be updated as new research findings and regulatory changes become available; periodic review of the latest version is recommended.
This Safety Data Sheet (SDS) is compiled by Kelvins for technical reference, prepared in accordance with GB/T 16483 and GB/T 17519. For the official SDS and batch inspection report, please contact us. If any data on this page is inconsistent with the manufacturer’s latest published version, the manufacturer’s official document shall prevail.
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