Tetrafluoromethane
R14 (tetrafluoromethane) is a deep-cryogenic PFC fluid with a boiling point as low as -128℃. It is used in sub -120℃ cascade refrigeration and semiconductor etching processes.
| Chemical Name | Carbon tetrafluoride |
|---|---|
| Molecular Formula | CF₄ |
| Molecular Weight | 88.00 |
| Boiling Point (101.3 kPa) | -128.0 ℃ |
| Critical Temperature | -45.6 ℃ |
| Critical Pressure | 3.74 MPa |
| ODP (Ozone Depletion Potential) | 0 |
| GWP (Global Warming Potential) | 6630 |
| ASHRAE Safety Class | A1 (Non-toxic, Non-flammable) |
| Vapor Density (air = 1) | 3.038 |
| Critical Density (g/cm³) | 0.6270 |
| Acentric Factor | 0.1785 |
| Triple Point Temperature (°C) | -153.150 |
| Appearance | Colorless, transparent, free of turbidity |
|---|---|
| Purity | ≥ 99.9 % |
| Moisture | ≤ 10 ppm |
| Acidity (as HCl) | ≤ 1 ppm |
| Evaporation Residue | ≤ 0.01 % |
| Executing Standard | Compliant with national and industry standards |
| 5 / 10 kg | Disposable steel cylinder |
|---|---|
| 40 kg | Refillable steel cylinder |
R14 is a PFC with high GWP and very long atmospheric lifetime. Use and emission must strictly follow environmental regulations; recover with dedicated equipment and never vent.
| Storage & Transportation | Store in a cool, well-ventilated warehouse away from fire and heat; temperature not above 52℃. Keep separated from oxidizers and acids. Inspect cylinders periodically and handle gently. |
|---|
This Technical Data Sheet (TDS) is provided by Kelvins Data are based on current product standards and Wulachem’s finished-product technical references, for reference only; actual parameters are subject to the factory inspection report. For the official MSDS/SDS or batch inspection report, please contact us.
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